Fabrication of the glass microlens arrays and the collimating property on nanolaser

The influence of the glass microlens array on the collection efficiency and beam collimating with the ZnO/GaN nanoheterojunction nanolaser is investigated. Ultraviolet random lasing behavior from the ZnO/GaN nanoheterojunction array has been demonstrated with both optical and electrical pumping. The refractive microlens arrays are designed and fabricated on the glass slide using the microfabrication procedures and integrated on the nanolaser. We show that, for the nanolaser with divergent output beams, the introduction of glass microlens arrays reduces the beam divergence and increases transmission. The detected optical power is enhanced by more than 1.8 times for the nanolaser integrated with glass microlens arrays. The drastic increase in the optical collection efficiency is resulted from the laser beam collimating.