Achromatic and high-resolution full-field X-ray microscopy based on total-reflection mirrors

被引：17
|
作者：
Matsuyama, Satoshi [1 ]
Emi, Yoji [1 ]
Kino, Hidetoshi [1 ]
Kohmura, Yoshiki [2 ]
Yabashi, Makina [2 ]
Ishikawa, Tetsuya [2 ]
Yamauchi, Kazuto [1 ,3 ]
机构：
[1] Osaka Univ, Grad Sch Engn, Dept Precis Sci & Technol, Suita, Osaka 5650871, Japan
[2] RIKEN SPring 8 Ctr, Sayo, Hyogo 6795148, Japan
[3] Osaka Univ, Grad Sch Engn, Res Ctr Ultra Precis Sci & Technol, Suita, Osaka 5650871, Japan
来源：
OPTICS EXPRESS | 2015年 / 23卷 / 08期
关键词：
SPATIAL-RESOLUTION; ZONE PLATES; OPTICS; NM; INTERFEROMETRY;
D O I：
10.1364/OE.23.009746
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We developed an achromatic and high-resolution full-field X-ray microscope based on advanced Kirkpatrick-Baez mirror optics that comprises two pairs of elliptical mirrors and hyperbolic mirrors utilizing the total reflection of X-rays. Performance tests to investigate the spatial resolution and chromatic aberration were performed at SPring-8. The microscope clearly resolved the pattern with similar to 100-nm feature size. Imaging the pattern by changing the X-ray energy revealed achromatism in the wide energy range of 8-11 keV. (C) 2015 Optical Society of America
引用
收藏
页码：9746 / 9752
页数：7
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