Periodic rib-reinforced silicon nitride scan mirrors

被引：1
|
作者：
Lutzenberger, BD [1 ]
Dickensheets, DL [1 ]
Himmer, PA [1 ]
机构：
[1] Montana State Univ, ECE Dept, Bozeman, MT 59717 USA
来源：
IEEE/LEOS Optical MEMs 2005: International Conference on Optical MEMs and Their Applications | 2005年
关键词：
'rib-reinforced silicon nitride; periodically stiffened micro stiffeners; stiffened micro mirrors;
D O I：
10.1109/OMEMS.2005.1540114
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Uniaxial scan mirrors measuring 1500 um in diameter were fabricated from a 1.4 um thick rib-reinforced silicon nitride film. The structurally enhanced film minimized surface deformation due to internal stress and inertial effects during actuation.
引用
收藏
页码：133 / 134
页数：2
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