Preparation of dense carbon nanotube film using microwave plasma-enhanced chemical vapor deposition

Dense, vertically aligned carbon nanotube (CNT) films were rapidly grown using microwave plasma-enhanced chemical vapor deposition (PCVD). Catalytic cobalt (Co) nanoparticles were prepared on the substrate using excimer laser ablation method. No heat pre-treatment was performed for the catalyst prior to the CNT growth. At the initial growth stage, the CNTs grew at an extremely high rate of 300 nm/s. The average outer diameter of the nanotubes was approximately 6 nm. The CNTs were characterized by their relatively large inner diameter (ca. 4 nm) and thinner wall thickness (2-5 concentric layers). (c) 2004 Elsevier B.V. All rights reserved.