On-skin liquid metal inertial sensor

被引：82
|
作者：
Varga, Matija [1 ,2 ]
Ladd, Collin [2 ]
Ma, Siyuan [2 ]
Holbery, Jim [2 ]
Troster, Gerhard [1 ]
机构：
[1] Swiss Fed Inst Technol, Elect Lab, Gloriastr 35, CH-8092 Zurich, Switzerland
[2] Microsoft Corp, Appl Sci Grp, Redmond, WA 98052 USA
来源：
LAB ON A CHIP | 2017年 / 17卷 / 19期
关键词：
STRETCHABLE ELECTRONICS; STRAIN; ALLOYS; FABRICATION; BEHAVIOR; DESIGN;
D O I：
10.1039/c7lc00735c
中图分类号：
Q5 [生物化学];
学科分类号：
071010 ; 081704 ;
摘要：
A wireless on-skin inertial sensor based on free-moving liquid metal is introduced. The inertial sensor comprises a eutectic gallium-indium (eGaIn) droplet that modulates the capacitance between two electrodes. The capacitive output of the sensor is connected to a planar coil to form an LC resonator whose resonant frequency can be read out wirelessly. Liquid metal electrodes and the coil are fabricated on a 20 mu m thick silicone membrane, which can stretch up to 600%, using spray-deposition of eGaIn. The moving droplet is encapsulated on the opposite side of the membrane using spray-deposition of Dragon Skin 10 silicone. The output characteristics, electrical simulations of the capacitance, and dynamic characteristics of the sensor are shown. The sensor is used for measuring tilt angles and recording arm gestures.
引用
收藏
页码：3272 / 3278
页数：7
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