Interferometric monitoring of concave aspheric surfaces

被引:0
|
作者
Grammatin, AP [1 ]
Faiziev, AS [1 ]
机构
[1] SI Vavilov State Opt Inst, St Petersburg, Russia
关键词
D O I
10.1364/JOT.68.000553
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
This paper discusses methods for interferometrically monitoring concave aspheric surfaces of second and higher orders. Possible systems are shown for monitoring concave paraboloids, ellipsoids, and hyperboloids. A technique is presented for designing a monitoring system using a synthesized hologram (a kinoform) as a compensator. (C) 2001 The Optical Society of America.
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页码:553 / 555
页数:3
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