High Resolution 3-D Laser Direct-Write Patterning

被引：0
|
作者：
Li, Linjie [1 ]
Gattass, Rafael R. [1 ]
Stocker, Michael [1 ]
Gershgoren, Erez [1 ]
Hwang, Hana [2 ]
Fourkas, John T. [1 ,3 ,4 ,5 ]
机构：
[1] Univ Maryland, Dept Chem & Biochem, College Pk, MD 20742 USA
[2] Univ Maryland, Dept Phys, College Pk, MD 20742 USA
[3] Univ Maryland, Inst Phys Sci & Technol, College Pk, MD 20742 USA
[4] Univ Maryland, Ctr Nanophys & Adv Mat, College Pk, MD 20742 USA
[5] Univ Maryland, Maryland Nano Ctr, College Pk, MD 20742 USA
来源：
2010 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) AND QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (QELS) | 2010年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Resolution Augmentation through Photo-Induced Deactivation (RAPID) lithography makes possible the creation of features that far smaller than the wavelength of light employed. We will present some of the latest advances in RAPID lithography. (C) 2010 Optical Society of America
引用
收藏
页数：2
相关论文
共 50 条
  • [1] High-resolution direct-write femtosecond laser technologies
    Serbin, J
    Chichkov, B
    [J]. SOLID STATE LASER TECHNOLOGIES AND FEMTOSECOND PHENOMENA, 2004, 5620 : 245 - 251
  • [2] FOLDABLE PAPER ELECTRONICS BY DIRECT-WRITE LASER PATTERNING
    Li, B.
    Chu, Y.
    Zang, X.
    Wei, M.
    Liu, H.
    Liu, Y.
    Ma, Y.
    Li, C.
    Wang, X.
    Lin, L.
    [J]. 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2017, : 335 - 338
  • [3] High-resolution direct-write patterning using focused ion beams
    Ocola, Leonidas E.
    Rue, Chad
    Maas, Diederik
    [J]. MRS BULLETIN, 2014, 39 (04) : 336 - 341
  • [4] High-resolution direct-write patterning using focused ion beams
    Leonidas E. Ocola
    Chad Rue
    Diederik Maas
    [J]. MRS Bulletin, 2014, 39 : 336 - 341
  • [5] Laser-assisted dealloying for direct-write patterning of plasmonic nanostructures
    Li, Jingting
    Zhao, Fusheng
    Shih, Wei-Chuan
    [J]. ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS X, 2017, 10115
  • [6] Concentrated hydroxyapatite inks for direct-write assembly of 3-D periodic scaffolds
    Michna, S
    Wu, W
    Lewis, JA
    [J]. BIOMATERIALS, 2005, 26 (28) : 5632 - 5639
  • [7] Patterning of poly(3-alkylthiophene) thin films by direct-write ultraviolet laser lithography
    Wong, TKS
    Gao, S
    Hu, X
    Liu, H
    Chan, YC
    Lam, YL
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1998, 55 (1-2): : 71 - 78
  • [8] Luminescent line art by direct-write patterning
    Erik Mattias Lindh
    Andreas Sandström
    Mats Roland Andersson
    Ludvig Edman
    [J]. Light: Science & Applications, 2016, 5 : e16050 - e16050
  • [9] Laser Direct-Write Processing
    Craig B. Arnold
    Alberto Piqué
    [J]. MRS Bulletin, 2007, 32 : 9 - 15
  • [10] Luminescent line art by direct-write patterning
    Lindh, Erik Mattias
    Sandstrom, Andreas
    Andersson, Mats Roland
    Edman, Ludvig
    [J]. LIGHT-SCIENCE & APPLICATIONS, 2016, 5 : e16050 - e16050
12345