Micro Sensors for Real-time Monitoring of Mold Spores and Pollen

被引：2
|
作者：
Tsuruzoe, Kei [1 ]
Hara, Kazuhiro [1 ]
机构：
[1] Tokyo Denki Univ, Sch Engn, Dept Elect & Elect Engn, Adachi Ku, 5 Senjyu Asahicho, Tokyo 1208551, Japan
来源：
BIODEVICES: PROCEEDINGS OF THE 2015 INTERNATIONAL CONFERENCE ON BIOMEDICAL ELECTRONICS AND DEVICES | 2015年
关键词：
Mold Spore; Pollen; Real time Monitoring; Micro Sensor; Semiconductor Thin Film; Metal Oxide;
D O I：
10.5220/0005279301740179
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
Organic airborne particles such as mold spores and pollen cause a variety of diseases. Two types of micro sensors for real-time monitoring of such organic airborne particles have been developed using semiconductor thin-film. A basic type thin-film sensor has a simple configuration with a double-layered sensing film deposited on an alumina substrate. A MEMS type sensor is composed of two parts: a sensing element and a micro heater. Both parts are fabricated by using thin film technology, IC fabrication process and micromachining technique. The double-layered sensing film is deposited on a diaphragm formed on a Si substrate. A thin film heater is placed in parallel at a distance of about 50 im. The resistance of both sensors steeply decreases and then recovers to the initial value when a mold spore or a grain of pollen adheres to the surface of the sensing film and burns on it. The resistance change and the recovery time depend on the size of the organic airborne particles. Thus it is p (More)
引用
收藏
页码：174 / 179
页数：6
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