Fabrication of sub-micron surface structures on copper, stainless steel and titanium using picosecond laser interference patterning

被引:95
|
作者
Bieda, Matthias [1 ]
Siebold, Mathias [2 ]
Lasagni, Andres Fabian [1 ,3 ]
机构
[1] Fraunhofer Inst Werkstoff & Strahltech IWS, Winterbergstr 28, D-01277 Dresden, Germany
[2] HZDR, Bautzner Landstr 400, D-01328 Dresden, Germany
[3] Tech Univ Dresden, Inst Fertigungstech, D-01062 Dresden, Germany
关键词
Picosecond DLIP; Surface structure; Two-temperature model; FEMTOSECOND; METALS; ELECTRON; LITHOGRAPHY; MICROSCALE; ABLATION; PLANAR; CR;
D O I
10.1016/j.apsusc.2016.06.100
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Picosecond direct laser interference patterning (ps-DLIP) is investigated theoretically and experimentally for the bulk metals copper, stainless steel and titanium. While surface texturing with nanosecond pulses is limited to feature sizes in the micrometer range, utilizing picosecond pulses can lead to sub-micrometer structures. The modelling and simulation of ps-DLIP are based on the two-temperature model and were carried out for a pulse duration of 35 ps at 515 nm wavelength and a laser fluence of 0.1 J/cm(2). The subsurface temperature distribution of both electrons and phonons was computed for periodic line-like structures with a pitch of 0.8 mu m. The increase in temperature rises for a lower absorption coefficient and a higher thermal conductivity. The distance, at which the maximum subsurface temperature occurs, increases for a small absorption coefficient. High absorption and low thermal conductivity minimize internal heating and give rise to a pronounced surface micro topography with pitches smaller than 1 mu m. In order to confirm the computed results, periodic line-like surface structures were produced using two interfering beams of a Yb:YAG-Laser with 515 nm wavelength and a pulse duration of 35 ps. It was possible to obtain a pitch of 0.7 mu m on the metallic surfaces. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:175 / 182
页数:8
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