Hints on chemical information obtained by ERDA measurements

被引：1

作者：

Strub, E ^{[1
]}

Bohne, W ^{[1
]}

Röhrich, J ^{[1
]}

机构：

[1] Hahn Meitner Inst Berlin GmbH, D-14109 Berlin, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2005年 / 240卷 / 1-2期

关键词：

ERDA; chemical composition; phase diagrams;

D O I：

10.1016/j.nimb.2005.06.130

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Nuclear scattering methods like RBS (Rutherford Backscattering) or ERDA (Elastic Recoil Detection Analysis) can provide important information on the elemental composition and depth profiles of thin layers. However, the chemical environment of a scattered atom is destroyed in the scattering process. Nevertheless, certain chemical information on the material under investigation can be obtained: If differences in the composition of slightly different samples can be correlated to parameters of the production process, it is possible to draw conclusions on chemical behaviour. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：283 / 287

页数：5

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