New elastomer materials provide enhanced longevity and sealing performance for semiconductor manufacturing equipment

被引：0
|
作者：
Foggiato, John [1 ]
Alexander, Brock [2 ]
机构：
[1] Greene Tweed Co, 2450 Scott Blvd,Suite 312, Santa Clara, CA 95050 USA
[2] Greene Tweed Co, Kulpsville, PA 19443 USA
来源：
2008 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE | 2008年
关键词：
D O I：
10.1109/ASMC.2008.4529044
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A review of materials and optimization of seal designs is given emphasizing performance enhancement of manufacturing equipment. Various attributes are delineated as they pertain to aggressive temperature and chemical environments.
引用
收藏
页码：233 / +
页数：2
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