Electrical characteristics of low-Mg-doped p-AlGaN and p-InGaN Schottky contacts

被引:0
|
作者
Aoki, Toshichika [1 ]
Tachibana, Sachi [1 ]
Shiojima, Kenji [1 ]
机构
[1] Univ Fukui, Grad Sch Elect & Elect Engn, Fukui 9108507, Japan
来源
关键词
AlGaN; doping; electrical properties; InGaN; magnesium; Schottky contacts; OHMIC CONTACTS; LOW-RESISTANCE; BARRIERS;
D O I
10.1002/pssb.201451590
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Electrical characteristics of low-Mg-doped p-Al0.02-0.07Ga0.98-0.93N and p-In0.02Ga0.98N Schottky contacts were investigated. A memory effect was revealed in the current-voltage (I-V) characteristics, which is found also in p-GaN contacts and may be due to charge and discharge of holes to acceptor-type interfacial defects. High-temperature isothermal transient spectroscopy revealed that the defect densities in the Al0.02Ga0.98N and In0.02Ga0.98N samples were nearly half that in the GaN samples. A large reverse current with a memory effect was observed in the In0.02Ga0.98N contacts. It was suggested that current can flow via relatively shallow acceptor-type interfacial defects. For the AlxGa1-xN with x = 0.04 and 0.07, I-V characteristics became leaky. The Schottky barrier heights estimated from the photoresponse experiment were higher than the values estimated from the bandgap by 0.19, 0.21, 0.20, and 0.21 eV for Al0.02Ga0.98N, Al0.04Ga0.96N, Al0.07Ga0.93N, and In0.02Ga0.98N samples, respectively. A probable explanation for such discrepancies may be due to the total charge amount of the interfacial states, which varied the electric field and the barrier lowering. It was found that even though the Al or In content was only as small as 2%, the electrical characteristics of the contacts changed significantly. (C) 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
引用
收藏
页码:1031 / 1037
页数:7
相关论文
共 50 条
  • [21] Low contact resistivity between Ni/Au and p-GaN through thin heavily Mg-doped p-GaN and p-InGaN compound contact layer
    Li Xiao-Jing
    Zhao De-Gang
    Jiang De-Sheng
    Chen Ping
    Zhu Jian-Jun
    Liu Zong-Shun
    Le Ling-Cong
    Yang Jing
    He Xiao-Guang
    CHINESE PHYSICS B, 2015, 24 (11)
  • [22] Changes in electrical and optical properties of p-AlGaN due to proton implantation
    Polyakov, AY
    Smirnov, NB
    Govorkov, AV
    Baik, KH
    Pearton, SJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (05): : 2291 - 2294
  • [23] Ni/Pd-based ohmic contacts to p-GaN through p-InGaN/p~+-GaN contacting layers
    Minglong Zhang
    Masao Ikeda
    Siyi Huang
    Jianping Liu
    Jianjun Zhu
    Shuming Zhang
    Hui Yang
    Journal of Semiconductors, 2022, (09) : 69 - 74
  • [24] Low contact resistivity between Ni/Au and p-GaN through thin heavily Mg-doped p-GaN and p-InGaN compound contact layer
    李晓静
    赵德刚
    江德生
    陈平
    朱建军
    刘宗顺
    乐伶聪
    杨静
    何晓光
    Chinese Physics B, 2015, 24 (11) : 393 - 396
  • [25] Impact of Mg level on lattice relaxation in a p-AlGaN hole source layer and attempting excimer laser annealing on p-AlGaN HSL of UVB emitters
    Khan, M. Ajmal
    Bermundo, Juan Paolo
    Ishikawa, Yasuaki
    Ikenoue, Hiroshi
    Fujikawa, Sachie
    Matsuura, Eriko
    Kashima, Yukio
    Maeda, Noritoshi
    Jo, Masafumi
    Hirayama, Hideki
    NANOTECHNOLOGY, 2021, 32 (05)
  • [26] Effects of the thickness of capping layers on electrical properties of Ni ohmic contacts on p-AlGaN and p-GaN using an ohmic recessed technique
    Lin, Yow-Jon
    Chu, Yow-Lin
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2006, 21 (08) : 1172 - 1175
  • [27] Forward tunneling current in Pt/p-InGaN and Pt/n-InGaN Schottky barriers in a wide temperature range
    Arslan, Engin
    Cakmak, Huseyin
    Ozbay, Ekmel
    MICROELECTRONIC ENGINEERING, 2012, 100 : 51 - 56
  • [28] Normally off AlGaN/GaN high electron mobility transistors with p-InGaN cap layer
    Mizutani, Takashi
    Yamada, Hiroyuki
    Kishimoto, Shigeru
    Nakamura, Fumihiko
    JOURNAL OF APPLIED PHYSICS, 2013, 113 (03)
  • [29] Influence of Thermal Annealing on the PdAl/Au Metal Stack Ohmic Contacts to p-AlGaN
    Mallem, Siva Pratap Reddy
    Ahn, Woo-Hyun
    Lee, Jung-Hee
    Im, Ki-Sik
    CRYSTALS, 2020, 10 (12): : 1 - 7
  • [30] Effects of Cp2Mg molar flow rate on structural, optical, and electrical properties of semipolar Mg-doped p-AlGaN epi-layers
    Lou, Zhiyi
    Zhang, Xiong
    Fang, Ruiting
    Xu, Yifeng
    Cui, Jia
    Gao, Yani
    Cao, Zelin
    Lai, Mu-Jen
    Dai, Qian
    Hu, Guohua
    OPTICAL MATERIALS, 2024, 152