Scanning soft X-ray spectromicroscopy at the Pohang Light Source: commissioning results

被引：20
|
作者：
Shin, HJ [1 ]
Lee, MK [1 ]
机构：
[1] POSTECH, Pohang Accelerator Lab, Beamline Dept, Pohang 790784, South Korea
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2001年 / 467卷
关键词：
spectromicroscopy; SPEM; STXM; X-ray microscopy;
D O I：
10.1016/S0168-9002(01)00517-4
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A scanning spectromicroscopy facility has been installed at the undulator radiation beamline at the Pohang Light Source. The spectromicroscopy is operational in both the scanning transmission X-ray microscopy (STXM) and the scanning photoelectron microscopy (SPEM) modes. Currently, the measured X-ray spot size on the sample is about 0.4 mum. The effective photon energy range of the STXM is 250- 1000 eV and that of the SPEM is 400-1000 eV. The performance of the facility is presented in this report. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：909 / 912
页数：4
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