Design and Implementation of High Frequency Power Supply with Constant Power Output for Plasma Applications

In this paper, a full bridge inverter, connected with a hybrid LCLC resonant tank and controlled by the optimum asymmetrical voltage cancellation (OAVC) approach, is presented to achieve high frequency high voltage power supply for plasma applications. The zero voltage switching (ZVS) of each power switch can be achieved by operating the inverter above the resonant frequency of the LCLC tank, which is beneficial for increasing system efficiency and reducing heat sink volume. In addition, the relationship between the voltage, current and the maximum power are deduced so that the plasma loads are able to work near the maximum power point with relative parameters settings. For verification, a 1kW-prototype, operating at 100 KHz, is implemented in the laboratory, and experimental results are presented to validate the parameters design and control strategies.