Diffusion of iron in lithium niobate: a secondary ion mass spectrometry study

被引：3
|
作者：
Ciampolillo, M. V. [1 ,2 ]
Argiolas, N. [1 ,2 ]
Zaltron, A. [1 ,2 ]
Bazzan, M. [1 ,2 ]
Sada, C. [1 ,2 ]
机构：
[1] Univ Padua, Dept Phys, Padua, Italy
[2] Univ Padua, CNISM, Padua, Italy
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2011年 / 105卷 / 01期
关键词：
Lithium Niobate; Residual Layer; Photorefractive Property; Cool Ramp; Optical Chip;
D O I：
10.1007/s00339-011-6559-x
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Iron-doped X-cut lithium niobate crystals were prepared by means of thermal diffusion from thin film varying in a systematic way the process parameters such as temperature and diffusion duration. Secondary Ion Mass Spectrometry was exploited to characterize the iron in-depth profiles. The evolution of the composition of the Fe thin film in the range between 600A degrees C and 800A degrees C was studied, and the diffusion coefficient at different temperatures in the range between 900A degrees C and 1050A degrees C and the activation energy of the diffusion process were estimated.
引用
收藏
页码：111 / 118
页数：8
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