Graphical user interface for SDTrimSP to simulate sputtering, ion implantation and the dynamic effects of ion irradiation

被引：22
|
作者：
Szabo, P. S. [1 ,2 ]
Weichselbaum, D. [1 ]
Biber, H. [1 ]
Cupak, C. [1 ]
Mutzke, A. [3 ]
Wilhelm, R. A. [1 ]
Aumayr, F. [1 ]
机构：
[1] TU Wien, Inst Appl Phys, Vienna, Austria
[2] Univ Calif Berkeley, Space Sci Lab, Berkeley, CA USA
[3] Max Planck Inst Plasma Phys, Greifswald, Germany
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2022年 / 522卷
基金：
奥地利科学基金会;
关键词：
SDTrimSP; Graphical user interface; Ion-solid interaction; Sputtering; Ion ranges; Ion-induced damages; simulation; COMPUTER-SIMULATION; ENERGETIC ATOMS; TRIDYN; MORPHOLOGY; PROGRAM; RANGES; YIELD; CODE; SRIM;
D O I：
10.1016/j.nimb.2022.04.008
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
SDTrimSP is a popular simulation program to compute several effects of the interaction between an impinging ion and a solid, such as ion implantation ranges, damage formation or sputtering of surface atoms. We now introduce a graphical user interface for SDTrimSP to make its operation more accessible for a broad group of users. It is written as a separate Python program and is not restricted to any specific operating system. The interface allows a quick and easy start as well as the direct evaluation of SDTrimSP simulations. Its capabilities are demonstrated here in the form of several example cases, including the dynamic simulations with SDTrimSP, where ion-induced target changes are taken into account. The presented graphical user interface is made freely available to support a large number of users in performing simulations of ion-solid interaction.
引用
收藏
页码：47 / 53
页数：7
相关论文
共 50 条
  • [31] Quartz modification by Zn ion implantation and swift Xe ion irradiation
    Privezentsev, Vladimir
    Kulikauskas, Vaclav
    Didyk, Alexander
    Skuratov, Vladimir
    Steinman, Edward
    Tereshchenko, Alexey
    Kolesnikov, Nikolay
    Trifonov, Alexey
    Sakharov, Oleg
    Ksenich, Sergey
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 14, NO 7, 2017, 14 (07):
  • [32] PREPARATION OF METAL GLASSES BY ION-IMPLANTATION AND OR SPUTTERING
    CAVALLERI, A
    DAPOR, M
    GIACOMOZZI, F
    GUZMAN, L
    OSSI, PM
    ZEITSCHRIFT FUR PHYSIKALISCHE CHEMIE NEUE FOLGE, 1988, 157 : 239 - 244
  • [33] Sputtering of silicon surface by silver-ion implantation
    Stepanov, A. L.
    Vorobev, V. V.
    Rogov, A. M.
    Nuzhdin, V., I
    Valeev, V. F.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2019, 457 : 1 - 3
  • [34] Ion irradiation to simulate neutron irradiation in model graphites: Consequences for nuclear graphite
    Galy, N.
    Toulhoat, N.
    Moncoffre, N.
    Pipon, Y.
    Bererd, N.
    Ammar, M. R.
    Simon, P.
    Deldicque, D.
    Sainsot, P.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2017, 409 : 235 - 240
  • [35] Magnetic patterning by means of ion irradiation and implantation
    Fassbender, J.
    McCord, J.
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2008, 320 (3-4) : 579 - 596
  • [36] Effects of silicon ion irradiation on the interface properties of SiCf/SiC composites
    Chai, Yuxin
    Zhang, Huayu
    Zhou, Xingui
    Zhang, Yumin
    CERAMICS INTERNATIONAL, 2018, 44 (02) : 2165 - 2169
  • [37] Argon ion-irradiation effects at the interface of Cu/Fe bilayers
    Desimoni, J
    Echeverría, G
    Punte, G
    Mercader, RC
    Behar, M
    Freeland, JW
    Walker, JC
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2000, 12 (22) : 4713 - 4721
  • [38] Dynamic scaling behavior of iron nitride thin films prepared by magnetron sputtering and ion implantation
    Li, WL
    Sun, Y
    Fei, WD
    TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA, 2005, 15 : 236 - 239
  • [39] Ion radiation albedo effect: influence of surface roughness on ion implantation and sputtering of materials
    Li, Yonggang
    Yang, Yang
    Short, Michael P.
    Ding, Zejun
    Zeng, Zhi
    Li, Ju
    NUCLEAR FUSION, 2017, 57 (01)
  • [40] A user-friendly graphical user interface for dynamic light scattering data analysis
    Salazar, Matthew
    Srivastav, Harsh
    Srivastava, Abhishek
    Srivastava, Samanvaya
    SOFT MATTER, 2023, 19 (34) : 6535 - 6544
12345