A heat-resistance and high-sensitivity acoustic pressure sensor based on aluminum-polyimide diaphragm

被引：17
|
作者：
Li, Xinxin [1 ]
Zhen, Shenglai [1 ]
Qian, Kai [2 ]
Liang, Xiudong [1 ]
Wang, Xiaoguang [1 ]
Shi, Jinhui [1 ]
Wu, Xuqiang [1 ]
Yu, Benli [1 ]
机构：
[1] Anhui Univ, Key Lab Optoelect Informat Acquisit & Manipulat, Hefei 230601, Anhui, Peoples R China
[2] Hubei Univ Nationalities, Sch Informat Engn, Enshi 445000, Peoples R China
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2018年 / 279卷
基金：
国家重点研发计划; 中国国家自然科学基金;
关键词：
Optical fiber sensor; Aluminum-polyimide diaphragm; Heat-resistance; Long-term stability; GRAPHENE DIAPHRAGM;
D O I：
10.1016/j.sna.2018.05.043
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A fiber-optic acoustic pressure sensor based on aluminum-polyimide diaphragm is proposed in this paper. The sensing diaphragm exhibits excellent properties including heat resistance and long-term stability (4 months). Together with hybrid configuration of Mach-Zehnder and Sagnac interferometer with triple detection passive demodulation algorithm, the sensor can measure the absolute amplitude of acoustic pressure. The sensor has a high sensitivity of 110 nm/Pa with the acoustic pressure amplitude of 2.05 mPa-7.15 Pa and gives a minimum detectable pressure of 37.7 mu Pa/Hz(1/2) at 4 kHz. The sensor also demonstrates a flat frequency response in the range of 600 Hz-6 kHz and is expected to be used for weak acoustic pressure sensing and photo-acoustic spectroscopy. (C) 2018 Elsevier B.V. All rights reserved.
引用
收藏
页码：75 / 78
页数：4
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