On the composition analysis of nc-TiC/a-C:H nanocomposite coatings

被引：6

作者：

Chechenin, N. G. ^{[1
]}

Chernykh, P. N. ^{[1
]}

Kulikauskas, V. S. ^{[1
]}

Pei, Y. T. ^{[2
]}

Vainshtein, D. ^{[2
]}

De Hosson, J. Th M. ^{[2
]}

机构：

[1] Skobeltsyn Inst Nucl Phys, Moscow 119991, Russia

[2] Univ Groningen, Netherlands Inst Met Res, Dept Appl Phys, NL-9747 AG Groningen, Netherlands

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2008年 / 41卷 / 08期

关键词：

D O I：

10.1088/0022-3727/41/8/085402

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Using a set of ion beam analysis (IBA) techniques the compositions of hydrogenated diamond-like carbon (DLC) nanocomposite coatings are scrutinized, including the hydrogen content. The coatings are composed of two constituents: amorphous hydrocarbon matrix (a-C : H) and nanocrystalline titanium carbide (nc-TiCa) which makes it challenging to quantify the sp(3)/sp(2) ratio of the a-C : H matrix. Using IBA and SEM data, the partial mass densities of nc-TiCa and a-C : H matrix are obtained. The latter is analysed as a function of hydrogen content and compared with the density of pure sp(3) bonding DLC and of sp(2) graphite containing different contents of hydrogen. In addition, the fraction of sp(3) bonding in the matrix is estimated assuming a linear dependence on the mass densities of the matrix.

引用

页数：7

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