Symbiotic simulation control in semiconductor manufacturing

被引：0

作者：

Aydt, Heiko ^{[1
]}

Turner, Stephen John ^{[1
]}

Cai, Wentong ^{[1
]}

Low, Malcolm Yoke Hean ^{[1
]}

Lendermann, Peter ^{[2
]}

Gan, Boon Ping ^{[2
]}

机构：

[1] Nanyang Technol Univ, Sch Comp Engn, Singapore 639798, Singapore

[2] D SIMLAB Technol Pte Ltd, Singapore 138671, Singapore

来源：

COMPUTATIONAL SCIENCE - ICCS 2008, PT 3 | 2008年 / 5103卷

关键词：

D O I：

暂无

中图分类号：

TP31 [计算机软件];

学科分类号：

081202 ; 0835 ;

摘要：

Semiconductor manufacturing is a highly complex and asset intensive process. Solutions are needed to automate control of equipment and improve efficiency. We describe a symbiotic simulation control system which uses reactive what-if analysis to find a stable configuration of a wet bench tool set. This control system is based on a generic framework for symbiotic simulation. We show that symbiotic simulation can be used to make control decisions in near real-time. Furthermore, we show that our approach yields a notable performance improvement over common practise.

引用

页码：26 / +

页数：3

共 50 条

[41] Monitoring and Control of Echelon Inventory in Semiconductor Manufacturing
Guo, Ruey-Shan
Chiang, David
ICOSCM 2007 - INTERNATIONAL CONFERENCE ON OPERATIONS AND SUPPLY CHAIN MANAGEMENT IN CHINA, 2007, 1
[42] PRODUCTION PLANNING FOR SEMICONDUCTOR MANUFACTURING VIA SIMULATION OPTIMIZATION
Liu, Jingang
Li, Chihui
Yang, Feng
Wan, Hong
Uzsoy, Reha
PROCEEDINGS OF THE 2011 WINTER SIMULATION CONFERENCE (WSC), 2011, : 3612 - 3622
[43] Simulation based multiobjective schedule optimization in semiconductor manufacturing
Gupta, AK
Sivakumar, AI
PROCEEDINGS OF THE 2002 WINTER SIMULATION CONFERENCE, VOLS 1 AND 2, 2002, : 1862 - 1870
[44] In-situ process control for semiconductor manufacturing
Taylor, JH
Whidden, TK
Zhao, XZ
PROCEEDINGS OF THE 2002 AMERICAN CONTROL CONFERENCE, VOLS 1-6, 2002, 1-6 : 2180 - 2185
[45] An ontology for production control of semiconductor manufacturing processes
Mönch, L
Stehli, M
MULTIAGENT SYSTEM TECHNOLOGIES, PROCEEDINGS, 2003, 2831 : 156 - 167
[46] On the utility of Run to Run control in semiconductor manufacturing
Musacchio, J
Rangan, S
Spanos, C
Poolla, K
1997 IEEE INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING CONFERENCE PROCEEDINGS, 1997, : D9 - D12
[47] Distributed WIP control in advanced semiconductor manufacturing
Qiu, R
Burda, R
Chylak, R
2002 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP: ADVANCING THE SCIENCE OF SEMICONDUCTOR MANUFACTURING EXCELLENCE, 2002, : 49 - 54
[48] INTELLIGENT MONITORING AND CONTROL OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
MURDOCK, JL
HAYESROTH, B
IEEE EXPERT-INTELLIGENT SYSTEMS & THEIR APPLICATIONS, 1991, 6 (06): : 19 - 31
[49] IMPROVED CONTAMINATION CONTROL IN SEMICONDUCTOR MANUFACTURING FACILITIES
HOENIG, SA
DANIEL, S
SOLID STATE TECHNOLOGY, 1984, 27 (03) : 119 - 123
[50] Statistical Process Control for Semiconductor Manufacturing Processes
Higashide, Masanobu
Nishina, Ken
Kawamura, Hironobu
Ishii, Naru
FRONTIERS IN STATISTICAL QUALITY CONTROL 9, 2010, : 71 - 84

← 1 2 3 4 5 →