Suppression of drain conductance in InP-based HEMTs by eliminating hole accumulation

被引:13
|
作者
Arai, T [1 ]
Sawada, K [1 ]
Okamoto, N [1 ]
Makiyama, K [1 ]
Takahashi, T [1 ]
Hara, N [1 ]
机构
[1] Fujitsu Labs Ltd, Atsugi, Kanagawa 2430497, Japan
关键词
drain conductance; frequency dispersion; HEMT; kink phenomena;
D O I
10.1109/TED.2003.813463
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have developed planar-type InP-bqsed high-electron mobility transistors (HEMTs) that significantly suppress the frequency dispersion of drain conductance (g(d)) and the kink phenomena, and have examined the physical mechanisms of these phenomena. These phenomena appear to be caused by hole accumulation at the extrinsic source due to impact ionization. Our planar structure includes alloyed ohmic contacts that eliminate the hole barrier at the interface between the carrier-supply layer and the channel in the source and drain region to suppress hole accumulation. Therefore, the planar structure effectively eliminated hole accumulation at the extrinsic source, and suppressed g(d) frequency dispersion to 25 % and the kink phenomena to 50 % compared with conventional structure HEMTs.
引用
收藏
页码:1189 / 1193
页数:5
相关论文
共 50 条
  • [41] Velocity enhancement in cryogenically cooled InP-based HEMTs on (411)A-oriented substrates
    Watanabe, Issei
    Shinohara, Keisuke
    Kitada, Takahiro
    Shimomura, Satoshi
    Yamashita, Yoshimi
    Endoh, Akira
    Mimura, Takashi
    Hiyamizu, Satoshi
    Matsui, Toshiaki
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2006, 53 (11) : 2842 - 2846
  • [42] Charge-collection dynamics of InP-based high electron mobility transistors (HEMTs)
    McMorrow, D
    Boos, JB
    Park, D
    Buchner, S
    Knudson, AR
    Melinger, JS
    [J]. 2001 6TH EUROPEAN CONFERENCE ON RADIATION AND ITS EFFECTS ON COMPONENTS AND SYSTEMS, 2002, : 132 - 137
  • [43] Enhancement of fMAX of InP-based HEMTs by double-recessed offset gate process
    王博
    丁芃
    封瑞泽
    曹书睿
    魏浩淼
    刘桐
    刘晓宇
    李海鸥
    金智
    [J]. Chinese Physics B, 2022, (05) : 854 - 859
  • [44] Channel thickness dependence of breakdown dynamic in InP-based lattice-matched HEMTs
    Sleiman, A
    Di Carlo, A
    Lugli, P
    Meneghesso, G
    Zanoni, E
    Thobel, JL
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2003, 50 (10) : 2009 - 2014
  • [45] Effect of 1 MeV electron irradiation on gate contact characteristics of InP-based HEMTs
    Sun, Shuxiang
    Liu, Hehe
    Yang, Bo
    Chang, Mingming
    Zhong, Yinghui
    Li, Yuxiao
    Ding, Peng
    Jin, Zhi
    Wei, Zhichao
    [J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2020, 114
  • [46] IMPROVEMENT IN HIGH FREQUENCY AND NOISE CHARACTERISTICS OF InP-BASED HEMTS BY REDUCING PARASITIC CAPACITANCE
    Takahashi, T.
    Makiyama, K.
    Hara, N.
    Sato, M.
    Hirose, T.
    [J]. 2008 IEEE 20TH INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS (IPRM), 2008, : 260 - +
  • [47] Charge-collection dynamics of InP-based high electron mobility transistors (HEMTs)
    McMorrow, D
    Boos, JB
    Park, D
    Buchner, S
    Knudson, AR
    Melinger, JS
    [J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2002, 49 (03) : 1396 - 1400
  • [48] Effects of proton irradiation at different incident angles on InAlAs/InGaAs InP-based HEMTs
    孙树祥
    魏志超
    夏鹏辉
    王文斌
    段智勇
    李玉晓
    钟英辉
    丁芃
    金智
    [J]. Chinese Physics B, 2018, (02) : 629 - 633
  • [49] Influence of double InGaAs/InAs channel on DC and RF performances of InP-based HEMTs
    Hao, H. L.
    Su, M. Y.
    Wu, H. T.
    Mei, H. Y.
    Yao, R. X.
    Liu, F.
    Wen, H.
    Sun, S. X.
    [J]. JOURNAL OF OVONIC RESEARCH, 2022, 18 (03): : 411 - 419
  • [50] Effects of proton irradiation at different incident angles on InAlAs/InGaAs InP-based HEMTs
    Sun, Shu-Xiang
    Wei, Zhi-Chao
    Xia, Peng-Hui
    Wang, Wen-Bin
    Duan, Zhi-Yong
    Li, Yu-Xiao
    Zhong, Ying-Hui
    Ding, Peng
    Jin, Zhi
    [J]. CHINESE PHYSICS B, 2018, 27 (02)