Evaluation of obliquely evaporated gadolinium gratings for neutron interferometry by X-ray microtomography

被引:5
|
作者
Samoto, Tetsuo [1 ]
Takano, Hidekazu [1 ]
Momose, Atsushi [1 ]
机构
[1] Tohoku Univ, Inst Multidisciplinary Res Adv Mat, Aoba Ku, 2-1-1 Katahira, Sendai, Miyagi 9808577, Japan
关键词
Density; X-ray microscope; Silicon microfabrication; Talbot-Lau interferometry; Evaporation; Shadowing effects;
D O I
10.1016/j.mssp.2018.05.038
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Gadolinium absorption gratings are critically important devices for grating-based neutron dark-field and phasecontrast imaging. The evaporation process is an excellent candidate for preparing Gd gratings large enough for imaging applications. However, there is some concern about the lower average density of obliquely evaporated Gd, which sometimes grows with many voids that are caused by shadowing effects. We have fabricated Gd gratings with 9-mu m and 4-mu m pitches as part of our design and measured the density distributions of the resulting Gd deposits by three-dimensional X-ray microtomography. The obtained tomographic image data is helpful not only for fabrication process design but also estimating device performance without performing neutron irradiation experiments.
引用
收藏
页码:91 / 95
页数:5
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