Novel backend singulation techniques to enable commercialization of optical MEMS

被引：1
|
作者：
Aberson, J [1 ]
Cusin, P [1 ]
Wylde, J [1 ]
Hickey, R [1 ]
Fettig, H [1 ]
机构：
[1] Colibrys SA, CH-2007 Neuchatel, Switzerland
来源：
INTERNATIONAL CONFERENCE ON MEMS, NANO AND SMART SYSTEMS, PROCEEDINGS | 2003年
关键词：
D O I：
10.1109/ICMENS.2003.1221980
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
引用
收藏
页码：131 / 131
页数：1
相关论文
共 50 条
  • [1] Challenges in optical MEMS commercialization and MEMS foundry
    Lee, C
    [J]. 2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST, 2002, : 157 - 158
  • [2] SINGULATION BY PLASMA ETCHING: INTEGRATION TECHNIQUES TO ENABLE LOW DAMAGE, HIGH PRODUCTIVITY DICING
    Barnett, Richard
    Thomas, Dave
    Ansell, Oliver
    [J]. INTERNATIONAL TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC MICROSYSTEMS, 2015, VOL 2, 2015,
  • [3] Commercialization of optical MEMS - Volume manufacturing approaches
    Markus, KW
    [J]. 2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, 2000, : 7 - 8
  • [4] The commercialization of optical techniques in Russian regions: Experience and problems
    Kartushina, TN
    Firsova, AA
    [J]. Saratov Fall Meeting 2004: Optical Technologies in Biophysics and Medicine VI, 2005, 5771 : 389 - 391
  • [5] A novel MEMS optical gyroscope
    Sun, Bo-hua
    Zhang, Bo
    [J]. PROCEEDINGS OF THE 5TH INTERNATIONAL CONFERENCE ON NONLINEAR MECHANICS, 2007, : 666 - 671
  • [6] Novel MEMS variable optical attenuator
    吴茂松
    杨春生
    茅昕辉
    赵小林
    蔡炳初
    [J]. Chinese Optics Letters, 2003, (03) : 139 - 141
  • [7] Novel optical MEMS device technology for optical networking
    Narendra, Rajashree
    McMullin, J. N.
    [J]. SARATOV FALL MEETING 2006: COHERENT OPTICS OF ORDERED AND RANDOM MEDIA VII, 2007, 6536
  • [8] Novel tunable lasers enable new nanoimaging techniques
    Sperling, Jaroslaw
    Kusch, Patryk
    Hens, Korbinian
    [J]. LASER FOCUS WORLD, 2019, 55 (01): : 103 - 107
  • [9] Advanced synchronization techniques enable novel ultrafast science
    Read, Ian
    O'Keefe, Kevin
    [J]. LASER FOCUS WORLD, 2010, 46 (11): : 39 - 42
  • [10] A novel optical fibers MEMS pressure sensor
    Ni Xiao-qi
    Wang Ming
    Chen Xu-xing
    Ge Yi-xian
    Rong Hua
    [J]. INTERNATIONAL MEMS CONFERENCE 2006, 2006, 34 : 996 - 1001
12345