Grayscale lithography system enables high-volume production of freeform micro-optics

被引：0
|
作者：
Thoss, Andreas [1 ]
Mitin, Dmitriy [2 ]
Leitel, Robert [3 ]
机构：
[1] THOSS Media, Berlin, Germany
[2] Fraunhofer IOF, Fraunhofer Inst Appl Opt & Precis, Dept Microopt Syst, Jena, Germany
[3] Fraunhofer IOF, Fraunhofer Inst Appl Opt & Precis, Adv Microopt Components, Jena, Germany
来源：
LASER FOCUS WORLD | 2021年 / 57卷 / 09期
关键词：
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A UV LED-based photolithography system combines grayscale technology with a digital reticle and stepper to produce freeform micro-optics on a 300 mm wafer, while enabling processing time and resolution to be tailored to specific applications.
引用
收藏
页码：39 / 43
页数：5
相关论文
共 50 条
  • [41] Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System
    Chia-Hung Hou
    Ming-Hung Li
    Chii-Chang Chen
    Jenq-Yang Chang
    Jinn-Kong Sheu
    Gou-Chung Chi
    Chuck Wu
    Wei-Tai Cheng
    Jui-Hung Yeh
    Optical Review, 2003, 10 : 287 - 289
  • [42] Digital holography as a tool for testing high-aperture micro-optics
    Müller, J
    Kebbel, V
    Jüptner, W
    OPTICS AND LASERS IN ENGINEERING, 2005, 43 (07) : 739 - 751
  • [43] Fabrication of Glass-Ceramic 3D Micro-Optics by Combining Laser Lithography and Calcination
    Balcas, Giedrius
    Malinauskas, Mangirdas
    Farsari, Maria
    Juodkazis, Saulius
    ADVANCED FUNCTIONAL MATERIALS, 2023, 33 (39)
  • [44] Implementation of PBGA into high-volume production
    Tien, James
    Kao, Thomas
    Duh, Magic
    Davis, Russ
    Surface mount technology, 1999, 13 (05):
  • [45] Artificial lift for high-volume production
    Fleshman, Roy
    Harryson
    Lekic, Obren
    Oilfield Review, 11 (01): : 48 - 63
  • [46] QUALITY ASSURANCE IN HIGH-VOLUME PRODUCTION
    SEARLE, AA
    MACHINERY AND PRODUCTION ENGINEERING, 1975, 127 (3285): : 490 - 493
  • [47] HIGH-VOLUME PRODUCTION OF SMALL PUMPS
    ASTROP, AW
    MACHINERY AND PRODUCTION ENGINEERING, 1974, 124 (3200): : 350 - 358
  • [48] HIGH-VOLUME PRODUCTION OF GOVERNOR WEIGHTS
    不详
    MACHINERY AND PRODUCTION ENGINEERING, 1970, 117 (3030): : 964 - &
  • [49] Printed tools for high-volume production
    Heiden, Paul
    Kunststoffe International, 2019, 109 (05): : 47 - 49
  • [50] FLEXIBLE AUTOMATION FOR HIGH-VOLUME PRODUCTION
    MONTAG, AC
    MANUFACTURING ENGINEERING, 1984, 93 (05): : 79 - 80
12345