Grayscale lithography system enables high-volume production of freeform micro-optics

被引：0
|
作者：
Thoss, Andreas [1 ]
Mitin, Dmitriy [2 ]
Leitel, Robert [3 ]
机构：
[1] THOSS Media, Berlin, Germany
[2] Fraunhofer IOF, Fraunhofer Inst Appl Opt & Precis, Dept Microopt Syst, Jena, Germany
[3] Fraunhofer IOF, Fraunhofer Inst Appl Opt & Precis, Adv Microopt Components, Jena, Germany
来源：
LASER FOCUS WORLD | 2021年 / 57卷 / 09期
关键词：
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A UV LED-based photolithography system combines grayscale technology with a digital reticle and stepper to produce freeform micro-optics on a 300 mm wafer, while enabling processing time and resolution to be tailored to specific applications.
引用
收藏
页码：39 / 43
页数：5
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