High-aspect-ratio micromachining of fluoropolymers using focused ion beam

被引：0

作者：

Matsui, Yoshinori ^{[1
]}

Miyoshi, Nozomi ^{[2
]}

Oshima, Akihiro ^{[2
]}

Seki, Shu ^{[1
]}

Washio, Masakazu ^{[2
]}

Tagawa, Seiichi ^{[1
]}

机构：

[1] Osaka Univ, Inst Sci & Ind Res, 8-1 Mihogaoka, Osaka 5670047, Japan

[2] Waseda Univ, Res Inst Sci & Engn, Tokyo 1698555, Japan

来源：

ION-BEAM-BASED NANOFABRICATION | 2007年 / 1020卷

关键词：

D O I：

暂无

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Poly(tetrafluoroethylene) (PTFE) microstructure with high aspect ratio (> 200) and without solid debris along the edge was fabricated with high etch rate using FIB. Evolution of PTFE by FIB is responsible for the high aspect ratio, the high etch rate, and the no solid debris. Roughness of etched surface of the PTFE increases with fluence, although edge of the etched area has good profiles. The etch mechanism seems to be complicated.

引用

页码：61 / 66

页数：6

共 50 条

[1] Deposition property investigation of a focused ion beam for a high-aspect-ratio metal tip
Dae Keun Choi
Sang Hoon Lee
[J]. Microsystem Technologies, 2013, 19 : 363 - 370
[2] Deposition property investigation of a focused ion beam for a high-aspect-ratio metal tip
Choi, Dae Keun
Lee, Sang Hoon
[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2013, 19 (03): : 363 - 370
[3] High-aspect-ratio bulk micromachining of titanium
Aimi, MF
Rao, MP
Macdonald, NC
Zuruzi, AS
Bothman, DP
[J]. NATURE MATERIALS, 2004, 3 (02) : 103 - 105
[4] High-aspect-ratio bulk micromachining of titanium
Marco F. Aimi
Masa P. Rao
Noel C. MacDonald
Abu Samah Zuruzi
David P. Bothman
[J]. Nature Materials, 2004, 3 : 103 - 105
[5] Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures
Nishikawa, H.
Furuta, Y.
Uchiya, N.
Haga, J.
Oikawa, M.
Satoh, T.
Ishii, Y.
Kamiya, T.
[J]. MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS, 2007, : 66 - +
[6] Electrochemical micromachining using vibratile tungsten wire for high-aspect-ratio microstructures
Wang, K.
[J]. SURFACE ENGINEERING AND APPLIED ELECTROCHEMISTRY, 2010, 46 (05): : 395 - 399
[7] Electrochemical micromachining using vibratile tungsten wire for high-aspect-ratio microstructures
K. Wang
[J]. Surface Engineering and Applied Electrochemistry, 2010, 46 : 395 - 399
[8] Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam Techniques
Caballero, David
Villanueva, Guillermo
Antonio Plaza, Jose
Mills, Christopher A.
Samitier, Josep
Errachid, Abdelhamid
[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2010, 10 (01) : 497 - 501
[9] Simulation and optimization of a micromachined gyroscope using high-aspect-ratio micromachining fabrication process
Ruan, AW
Tse, MS
Chong, GY
[J]. DESIGN, CHARACTERIZATION, AND PACKAGING FOR MEMS AND MICROELECTRONICS II, 2001, 4593 : 176 - 185
[10] Synchrotron radiation micromachining of polymers to produce high-aspect-ratio microparts
Zhang, YP
Katoh, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1996, 35 (2A): : L186 - L188

← 1 2 3 4 5 →