FABRICATION OF AN ELECTRO-THERMAL MICRO GRIPPER USING SILVER-NICKEL INK

被引：0

作者：

Feng, Yao-Yun ^{[1
]}

Chen, Shih-Jui ^{[1
]}

Hsieh, Ping-Hsun ^{[1
]}

机构：

[1] Natl Cent Univ, Dept Mech Engn, Taoyuan, Taiwan

来源：

2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2016年

关键词：

DESIGN;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a miniaturized electro-thermal gripper with a novel fabrication process applying composite silver-nickel ink. Compared to state of the art, a thick resistive structure is dispensed on a silicon wafer by an injecting machine, which will decrease the fabrication process complexity. Device size, driving power and deformation of the gripper could be further improved by stacking multi-layers of silver-nickel structures. In the paper, the electrical and mechanical behaviors of the micro-grippers are well characterized. The displacement of each arm is observed to be 310.6 mu m for the applied current of 0.26 A. The maximum power dissipation is 400 mW for the actuators. The fabricated micro gripper can grip a small ball with a diameter of 1.3 mm.

引用

页码：1141 / 1144

页数：4

共 50 条

[31] Fabrication of 3D Electro-Thermal Micro Actuator in silica glass by femtosecond laser wet etch and microsolidics
Li, Qichao
Shan, Chao
Yang, Qing
Chen, Feng
Bian, Hao
Hou, Xun
SECOND INTERNATIONAL CONFERENCE ON PHOTONICS AND OPTICAL ENGINEERING, 2017, 10256
[32] Electro-thermal circuit simulation using simulator coupling
Wunsche, S
Clauss, C
Schwarz, P
Winkler, F
IEEE TRANSACTIONS ON VERY LARGE SCALE INTEGRATION (VLSI) SYSTEMS, 1997, 5 (03) : 277 - 282
[33] Electro-thermal circuit simulation using simulator coupling
Fraunhofer Inst of Integrated, Circuits, Dresden, Germany
IEEE Trans Very Large Scale Integr VLSI Syst, 3 (277-282):
[34] Electro-thermal modelling of infrared microemitters using PSPICE
Kiran, SR
Karunasiri, G
SENSORS AND ACTUATORS A-PHYSICAL, 1999, 72 (02) : 110 - 114
[35] Design and Fabrication of Micro Gripper Using Functional Fluid Power
Tanaka, Yutaka
Suzuki, Ryuta
Edamura, Kazuya
Yokota, Shinichi
INTERNATIONAL JOURNAL OF AUTOMATION TECHNOLOGY, 2022, 16 (04) : 448 - 455
[36] Electro-thermal simulation of ZnO arresters for diagnosis using thermal analysis
Neto, ETW
da Costa, EG
Maia, MJA
Galindo, TCL
Costa, AHS
2004 IEEE/PES TRANSMISSION & DISTRIBUTION CONFERENCE & EXPOSITION: LATIN AMERICA, 2004, : 338 - 343
[37] DETERMINATION OF SILVER IN SILICATE ROCKS BY ELECTRO-THERMAL ATOMIC-ABSORPTION SPECTROMETRY
ARUSCAVAGE, PJ
CAMPBELL, EY
ANALYTICA CHIMICA ACTA, 1979, 109 (01) : 171 - 175
[38] Analysis on Electro-Thermal Property of Micro-Bubble Generator Using Carbon Nanotube Heating Elements
Zhou, Wenli
Wan, Sanping
Zhu, Chao
2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2, 2009, : 106 - 111
[39] Design and fabrication of an electro-thermal linear motor with large output force and displacement
Hu, Tengjiang
Zhao, Yulong
Li, Xiuyuan
Zhao, You
Bai, Yingwei
2016 IEEE SENSORS, 2016,
[40] Fabrication and electro-thermal performances of glass fiber/carbon nanotube film composites
Huang, Yaofei
Zhao, Zhiyong
Peng, Chong
Yang, Kuo
Gao, Pengfei
Gao, Jun
Chu, Xingrong
Wang, Yaoqi
COMPOSITE STRUCTURES, 2025, 354

← 1 2 3 4 5 →