FABRICATION OF AN ELECTRO-THERMAL MICRO GRIPPER USING SILVER-NICKEL INK

被引：0
|
作者：
Feng, Yao-Yun [1 ]
Chen, Shih-Jui [1 ]
Hsieh, Ping-Hsun [1 ]
机构：
[1] Natl Cent Univ, Dept Mech Engn, Taoyuan, Taiwan
来源：
2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2016年
关键词：
DESIGN;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports a miniaturized electro-thermal gripper with a novel fabrication process applying composite silver-nickel ink. Compared to state of the art, a thick resistive structure is dispensed on a silicon wafer by an injecting machine, which will decrease the fabrication process complexity. Device size, driving power and deformation of the gripper could be further improved by stacking multi-layers of silver-nickel structures. In the paper, the electrical and mechanical behaviors of the micro-grippers are well characterized. The displacement of each arm is observed to be 310.6 mu m for the applied current of 0.26 A. The maximum power dissipation is 400 mW for the actuators. The fabricated micro gripper can grip a small ball with a diameter of 1.3 mm.
引用
收藏
页码：1141 / 1144
页数：4
相关论文
共 50 条
  • [1] Fabrication of an electro-thermal micro-gripper with elliptical cross-sections using silver-nickel composite ink
    Feng, Yao-Yun
    Chen, Shih-Jui
    Hsieh, Ping-Hsun
    Chu, Wen-Ting
    SENSORS AND ACTUATORS A-PHYSICAL, 2016, 245 : 106 - 112
  • [2] Characterization of an electro-thermal micro gripper and tip sharpening using FIB technique
    Deutschinger, A.
    Schmid, U.
    Schneider, M.
    Brenner, W.
    Wanzenboeck, H.
    Volland, B.
    Ivanov, Tzv.
    Rangelow, I. W.
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2010, 16 (11): : 1901 - 1908
  • [3] Characterization of an electro-thermal micro gripper and tip sharpening using FIB technique
    A. Deutschinger
    U. Schmid
    M. Schneider
    W. Brenner
    H. Wanzenböck
    B. Volland
    Tzv. Ivanov
    I. W. Rangelow
    Microsystem Technologies, 2010, 16 : 1901 - 1908
  • [4] Aspects of fabrication and characterization of electro-thermal micro-actuators
    de Godoy, Paulo Henrique
    Nelli Silva, Emilio Carlos
    JOURNAL OF THE BRAZILIAN SOCIETY OF MECHANICAL SCIENCES AND ENGINEERING, 2007, 29 (01) : 26 - 33
  • [5] Design and Control of a MEMS Micro-gripper with Integrated Electro-thermal Force Sensor
    Piriyanont, Busara
    Moheimani, S. O. Reza
    Bazaei, Ali
    2013 3RD AUSTRALIAN CONTROL CONFERENCE (AUCC), 2013, : 479 - 484
  • [6] Design and fabrication of Electro-Thermal 1-D Micro-Mirror
    Maharshi, Vikram
    Mere, Viphretuo
    Agarwal, Ajay
    PROCEEDINGS OF 2018 IEEE INTERNATIONAL CONFERENCE ON ELECTRON DEVICES KOLKATA CONFERENCE (IEEE EDKCON), 2018, : 419 - 422
  • [7] Design and Fabrication of a Metallic MEMS Gripper Using Electro-thermal V-shape and Modified U-shape Actuators
    Khazaai, Jay J.
    Qu, H.
    Shillor, M.
    Smith, L.
    Cheok, Ka. C.
    NANOTECHNOLOGY 2011: ELECTRONICS, DEVICES, FABRICATION, MEMS, FLUIDICS AND COMPUTATIONAL, NSTI-NANOTECH 2011, VOL 2, 2011, : 353 - 356
  • [8] The robust design for micro electro-thermal actuators
    Heo, S
    Yoon, GH
    Kim, YY
    SMART STRUCTURES AND MATERIALS 2004: SMART ELECTRONICS, MEMS, BIOMEMS AND NANOTECHNOLOGY, 2004, 5389 : 241 - 247
  • [9] Micro assembly by micro resistance welding with electro-thermal actuators
    Yeh, Cheng-Chi
    Chung, Junwei
    Chang, Chun-Wei
    Hsu, Wensyang
    2007 2ND IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2007, : 35 - +
  • [10] Duo-action electro thermal micro gripper
    Volland, B. E.
    Ivanova, K.
    Ivanov, Tzv.
    Sarov, Y.
    Guliyev, E.
    Persaud, A.
    Zoellner, J. P.
    Klett, S.
    Kostic, I.
    Rangelow, I. W.
    MICROELECTRONIC ENGINEERING, 2007, 84 (5-8) : 1329 - 1332
12345