Thickness of diamond-like carbon coatings quantified with Raman spectroscopy

被引：50
|
作者：
Scharf, TW [1 ]
Singer, IL [1 ]
机构：
[1] USN, Res Lab, Tribol Sect, Washington, DC 20375 USA
来源：
THIN SOLID FILMS | 2003年 / 440卷 / 1-2期
关键词：
diamond-like carbon; Raman spectroscopy; coatings; depth profiling;
D O I：
10.1016/S0040-6090(03)00703-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A model is developed for quantifying the thickness of thin coatings and wear scars using Raman spectroscopy. The model, which assumes that both incident and Raman light obey Beer's law, was applied to Raman spectra from a diamond-like carbon (DLC) coating containing Si and O, known as DLN (diamond-like nanocomposite). The coatings ranged in thickness from 10 nm to 2 mum, according to stylus profilometry. Systematic variations in the Raman carbon (G band) and Si (1st order) peak intensities vs. thickness were found. Fits to the model gave an optical mean free path of lambda similar to 250 nm for DLN. This value is in good agreement with optical absorption coefficient values of other DLC films. Thickness profiles of wear tracks in the coatings determined by the model compared well with depths determined by profilometry. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：138 / 144
页数：7
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