Analysis of GaAs/AlAs superlattice structure by X-ray double-crystal diffraction

The high quality GaAs/AlAs superlattice structures are characterized by X-ray double-crystal diffraction. The structure parameters of the superlattice are obtained from the rocking curve. The first and second satellite peaks appear around the main 0th-order peak. The FWHMs of 0th-order peak and GaAs substrate are quite close, showing much higher integrity of the crystal lattice. The superlattice structure period D, GaAs thickness L-B and AlAs thickness L-Z can be calculated according to the measured angular distance between the diffraction peaks. The experimental results show that the measured values are the same as the designed results. They are useful for improving the quality of superlattice.