Correlation of residual stress with optical absorption edge in diamond-like carbon films

被引：12

作者：

Kumar, S ^{[1
]}

Dixit, PN ^{[1
]}

Panwar, OS ^{[1
]}

Bhattacharyya, R ^{[1
]}

机构：

[1] Natl Phys Lab, Thin Film Technol Grp, New Delhi 110012, India

来源：

关键词：

diamond-like carbon; stress; optical absorption edge; disorder;

D O I：

10.1016/S0925-9635(03)00245-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A correlation has been observed between the residual stress and the optical absorption edge of diamond-like carbon films and on the basis of this correlation, an empirical relation has been established between the Urbach energy (E-0) and the residual stress (S) in the films given by E-0 = E-00 + mS, where E-00 = 140 meV and m = 37 meV/GPa. The residual stress and the optical absorption edges of diamond-like carbon films, grown by different techniques, are then discussed in terms of amount of disorder in the network. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：1576 / 1583

页数：8

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