Correlation of residual stress with optical absorption edge in diamond-like carbon films

A correlation has been observed between the residual stress and the optical absorption edge of diamond-like carbon films and on the basis of this correlation, an empirical relation has been established between the Urbach energy (E-0) and the residual stress (S) in the films given by E-0 = E-00 + mS, where E-00 = 140 meV and m = 37 meV/GPa. The residual stress and the optical absorption edges of diamond-like carbon films, grown by different techniques, are then discussed in terms of amount of disorder in the network. (C) 2003 Elsevier Science B.V. All rights reserved.