Electro-optic testing technology for high-speed LSIs

被引:0
|
作者
Nagatsuma, T
机构
关键词
electro-optics; Pockels effect; sampling; pulse laser; testing;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
With increases in the speed of semiconductor devices and integrated circuits, the importance of internal testing with sufficient temporal resolution has been growing. This paper describes recently established electro-optic testing technologies based on pulse lasers and electro-optic crystal probes. Practicability, limitation and future issues are discussed.
引用
收藏
页码:482 / 488
页数:7
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