High-resolution confocal microscopy with low-NA objectives based on diffractive lens arrays

被引:3
|
作者
Li, Zheng [1 ,2 ]
Taphanel, Miro [1 ,2 ]
Laengle, Thomas [1 ]
Beyerer, Juergen [1 ,2 ]
机构
[1] Fraunhofer Inst Optron Syst Technol & Image Explo, Fraunhoferstr 1, D-76131 Karlsruhe, Germany
[2] Karlsruhe Inst Technol, Vis & Fus Lab, Technol Fabrik, Haid & Neu Str 7, D-76131 Karlsruhe, Germany
关键词
HIGH-THROUGHPUT;
D O I
10.1364/AO.423933
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
High resolution and large fields of view are difficult to achieve simultaneously by microscope objectives. In this work, we develop a reflection confocal microscope based on diffractive lens arrays to solve the problem. We demonstrate a prototype that generates a spot array with a numerical aperture of 0.78. Laterally, experiments show a spatial cutoff frequency of 1024 lp/mm by a 0.15 NA objective, and 912 lp/mm by a 0.07 NA objective with a 785 nm diode laser. Axially, an average height of 961 nm with a standard deviation of 49 nm is measured with a 925.5 nm calibrated step height target. (C) 2021 Optical Society of America
引用
收藏
页码:F1 / F5
页数:5
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