Fabrication of the three-dimensional solenoid type micro magnetic sensor

被引：3
|
作者：
Wang, Yiming [1 ]
Liu, Gang [1 ]
Xiong, Yin [1 ]
Yang, Jianzhong [2 ]
Tian, Yangchao [1 ]
机构：
[1] Univ Sci & Technol China, Natl Synchrotron Radiat Lab, Hefei 230029, Peoples R China
[2] Tsinghua Univ, Dept Precis Instruments & Mechanol, Beijing 100084, Peoples R China
来源：
INTERNATIONAL MEMS CONFERENCE 2006 | 2006年 / 34卷
关键词：
D O I：
10.1088/1742-6596/34/1/146
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
There has been a large demand for the realization of on-chip fluxgate magnetic sensors, with exciting and sensing control IC circuits. Based on UV lithography and other MEMS technology, a new three dimensional solenoid type micro magnetic sensor has been designed and fabricated to measure the components of magnetic induction vector in outer space. The fabricated micro sensor was integrated in IC circuits of MEMS satellite.
引用
收藏
页码：880 / 884
页数：5
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