Analysis of phase measurement error for null generalized ellipsometry using the phase compensator

被引：0
|
作者：
Logofatu, PC [1 ]
机构：
[1] Univ New Mexico, Ctr High Technol Mat, Albuquerque, NM 87106 USA
来源：
JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS | 2001年 / 3卷 / 01期
关键词：
ellipsometry; phase compensator; error analysis;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
An error analysis of null generalized ellipsometry for phase measurement using a Babinet compensator is presented. It turns out that there are errors only in a second order approximation, which means this technique provides high sensitivity for phase measurements. The sensitivity can be improved by equalizing the amplitudes of the x and y components of the field at the Babinet compensator but this complicates considerably the experimental procedure.
引用
收藏
页码：45 / 49
页数：5
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