Design, fabrication and characterization of a microactuator for nebulization of fluids

被引：0

作者：

Yasenov, N ^{[1
]}

Berberich, S ^{[1
]}

Frey, L ^{[1
]}

Ryssel, H ^{[1
]}

机构：

[1] Univ Erlangen Nurnberg, Chair Elect Devices, D-91058 Erlangen, Germany

来源：

SENSORS AND MICROSYSTEMS, PROCEEDINGS | 2004年

关键词：

D O I：

10.1142/9789812702944_0061

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

This article deals with basic investigations of the development and manufacturing process of a piezoelectric driven microactuator for nebulization of fluids. The concept of the fabrication of the micronebulizer will be introduced. First fundamental investigations on materials characterization and process technology for the electrodes and piezoelectric A1N layers will be presented. A1N thin films have been depositetd by reactive sputtering technique and have been characterized with dielectric and ferroelectric measurements.

引用

页码：388 / 391

页数：4

共 50 条

[41] ULTRASONIC NEBULIZATION OF FLUIDS WITH DIFFERENT VISCOSITIES AND SURFACE TENSIONS
MCCALLION, ONM
TAYLOR, KMG
THOMAS, M
TAYLOR, AJ
JOURNAL OF AEROSOL MEDICINE-DEPOSITION CLEARANCE AND EFFECTS IN THE LUNG, 1995, 8 (03): : 281 - 284
[42] Optimal shape design of a rotary microactuator
Jung, SW
Jeon, JU
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2001, 10 (03) : 460 - 468
[43] The viscosity deviation of magnetic fluids for microactuator due to temperature changes
Ahn, JJ
Oh, J
Sim, W
Choi, BY
2ND ANNUAL INTERNATIONAL IEEE-EMBS SPECIAL TOPIC CONFERENCE ON MICROTECHNOLOGIES IN MEDICINE & BIOLOGY, PROCEEDINGS, 2002, : 504 - 508
[44] Design and fabrication of micro-compliant amplifier with topology optimal compliant mechanism integrated with a piezoelectric microactuator
Huang, Shyh-Chour
Lan, Guh-Jyhjei
Proceedings of the Seventh IEEE CPMT Conference on High Density Microsystem Design, Packaging and Failure Analysis (HDP'05), 2005, : 373 - 380
[45] Design, Fabrication and Characterization of a Mechanical Micropump
Duan, Bin
Guo, Tinghui
Luo, Minqing
Luo, Xiaobing
INTERNATIONAL TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC MICROSYSTEMS, 2015, VOL 1, 2015,
[46] Microcantilever hotplates: Design, fabrication, and characterization
Lee, Jungchul
King, William P.
SENSORS AND ACTUATORS A-PHYSICAL, 2007, 136 (01) : 291 - 298
[47] Design, Fabrication, and Characterization of Graphene Thermistor
Al-Mumen, Haider
Rao, Fubo
Dong, Lixin
Li, Wen
2013 8TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE NEMS 2013), 2013, : 1135 - 1138
[48] Design, Fabrication and Electrical Characterization of TSV
Zhang, L.
Li, H. Y.
Gao, S.
Tan, C. S.
2010 12TH ELECTRONICS PACKAGING TECHNOLOGY CONFERENCE (EPTC), 2010, : 765 - 768
[49] Design, fabrication, and characterization of a multidimensional prism
Chuang, Yun-Ju
Hung, Kuo-Yung
Tsai, Yi-Wei
APPLIED OPTICS, 2019, 58 (06) : 1419 - 1425
[50] DESIGN AND CHARACTERIZATION OF THE MOLECULAR ENVIRONMENT IN SUPERCRITICAL FLUIDS
JOHNSTON, KP
MCFANN, GJ
PECK, DG
LEMERT, RM
FLUID PHASE EQUILIBRIA, 1989, 52 : 337 - 346

← 1 2 3 4 5 →