Manufacture of the field emission emitters using GEM

被引：0
|
作者：
Teng, MY [1 ]
Teng, MH [1 ]
Liu, KS [1 ]
Lin, IN [1 ]
机构：
[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu, Taiwan
来源：
TECHNICAL DIGEST OF THE 16TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE | 2003年
关键词：
D O I：
暂无
中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
摘要：
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页码：151 / 152
页数：2
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