Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system

被引:4
|
作者
Zhang, Xia [1 ]
Wang, Hao [1 ]
Zheng, Xu-dong [2 ]
Hu, Shi-chang [1 ]
Jin, Zhong-he [1 ]
机构
[1] Zhejiang Univ, Dept Informat Sci & Elect Engn, Hangzhou 310027, Peoples R China
[2] Beijing Inst Aerosp Control Devices, Beijing 100854, Peoples R China
关键词
Capacitive accelerometer; Micro-electromechanical system (MEMS); Noise; Modeling; Simulation; SIMULATION; DESIGN;
D O I
10.1631/jzus.C0910757
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
We analyze the effects of possible noise sources on a fence structure micromachined capacitive accelerometer system by modeling and simulation to improve its performance. Simulation results show that a mismatch between the two initial sensing capacitors of the accelerometer or a mismatch between the two capacitance-voltage conversion circuits has a great effect on the output noise floor. When there is a serious mismatch, the noise induced by a sinusoidal carrier is the major noise source. When there is no or only a slight mismatch, the differential capacitance-voltage conversion circuits become the main noise source. The simulation results were validated by experiments and some effective approaches are proposed to improve the system resolution.
引用
收藏
页码:1009 / 1015
页数:7
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