Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system

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作者：
Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou [1 ]
310027, China
不详 [2 ]
100854, China
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来源：
J. Zhejiang Univ. Sci. C | / 12卷 / 1009-1015期
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摘要：
Fences
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页码：1009 / 1015
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