Influence of System Performance on Layer Thickness Determination Using Terahertz Time-Domain Spectroscopy

被引：13

作者：

Weber, Stefan ^{[1
,2
,3
]}

Liebelt, Lukas ^{[4
]}

Klier, Jens ^{[1
]}

Pfeiffer, Tobias ^{[1
]}

Molter, Daniel ^{[1
]}

Ellrich, Frank ^{[4
]}

Jonuscheit, Joachim ^{[1
]}

Von Freymann, Georg ^{[1
,2
,3
]}

机构：

[1] Fraunhofer Inst Ind Math ITWM, Ctr Mat Characterizat & Testing, D-67663 Kaiserslautern, Germany

[2] Tech Univ Kaiserslautern, Dept Phys, D-67663 Kaiserslautern, Germany

[3] Tech Univ Kaiserslautern, Res Ctr OPTIMAS, D-67663 Kaiserslautern, Germany

[4] Univ Appl Sci, TH Bingen, D-55411 Bingen, Germany

来源：

JOURNAL OF INFRARED MILLIMETER AND TERAHERTZ WAVES | 2020年 / 41卷 / 04期

关键词：

Terahertz time-domain spectroscopy; Thin films; Thickness determination; Industrial; Application;

D O I：

10.1007/s10762-020-00669-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The quality of coatings in industrial applications and scientific research with thicknesses in the micrometer range is an important criterion for quality management. Therefore, thickness determination devices are of high interest. Terahertz time-domain spectroscopy systems have demonstrated the capability to address thickness determination of dielectric single- and multilayer coatings on different substrates. However, due to the large range of different samples, there are different performance requirements to ensure a high-quality determination result. In this paper, we investigate the influence of system parameters-bandwidth and dynamic range-on thickness determination performance for a single-layer coating on metal substrates with thicknesses from 0.5 to 100 pm, based on measurements and numerical calculations within dynamic ranges from 10 to 90 dB and bandwidths from 1.5 to 10 THz.

引用

页码：438 / 449

页数：12

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