The effect of ultraviolet irradiation on the properties of Zr/Si contacts

被引：1
|
作者：
Nuprienok, IS [1 ]
Shibko, AN [1 ]
机构：
[1] Byelarussian Acad Sci, Inst Elect, Minsk 220841, BELARUS
来源：
TECHNICAL PHYSICS | 2001年 / 46卷 / 09期
关键词：
D O I：
10.1134/1.1404161
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The effect of ultraviolet (UV) irradiation on the properties of Zr/Si contacts subjected to heat treatment is investigated. It is established that, due to variations in the phase composition of the contact, its electrophysical parameters are modified. The application of the combined treatment allows one to form Zr/Si contacts with specified properties. (C) 2001 MAIK "Nauka/Interperiodica".
引用
收藏
页码：1112 / 1115
页数：4
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