On the frustration of back-surface reflection from transparent substrates in ellipsometry

被引：12
|
作者：
Hayton, DJ [1 ]
Jenkins, TE [1 ]
机构：
[1] Univ Wales, Dept Phys, Aberystwyth SY23 3BZ, Dyfed, Wales
来源：
MEASUREMENT SCIENCE AND TECHNOLOGY | 2004年 / 15卷 / 02期
关键词：
refractive index; ellipsometer; standards and calibration;
D O I：
10.1088/0957-0233/15/2/N01
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The effects of back-surface reflection from transparent substrates on ellipsometric measurements are discussed and it is shown that their effects can be minimized by placing the substrate on a commercially available product, Blu-tack. The ellipsometric properties of Blu-tack in the range 250-850 nm are presented and the frustration of the back-surface reflection is discussed in terms of index matching between substrate and Btu-tack.
引用
收藏
页码：N17 / N20
页数：4
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