ELECTRON PROPERTIES OF RADIO-FREQUENCY CAPACITIVE DISCHARGE AT ATMOSPHERIC PRESSURE

被引：0
|
作者：
Park, S. [1 ]
Choe, Wonho [1 ]
Kim, K. [1 ]
Park, J. Y. [1 ]
Moon, S. Y. [2 ]
机构：
[1] Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea
[2] Chonbuk Natl Univ, Dept Quantum Syst Engn, Jeonju 561756, South Korea
来源：
2015 42ND IEEE INTERNATIONAL CONFERENCE ON PLASMA SCIENCES (ICOPS) | 2015年
关键词：
D O I：
暂无
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
引用
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页数：1
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