Optical characterization of rf inductively coupled plasmas

被引：0

作者：

Wendt, AE ^{[1
]}

Beale, DF ^{[1
]}

Hitchon, WNG ^{[1
]}

Keiter, E ^{[1
]}

Kolobov, V ^{[1
]}

Mahoney, L ^{[1
]}

Pierre, AA ^{[1
]}

Stittsworth, J ^{[1
]}

机构：

[1] Univ Wisconsin, Dept Elect & Comp Engn, Madison, WI 53706 USA

来源：

ELECTRON KINETICS AND APPLICATIONS OF GLOW DISCHARGES | 1998年 / 367卷

关键词：

D O I：

暂无

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：489 / 502

页数：14

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