Size Dependent Pull-in Phenomena in Electro-statically Actuated Micro-beam Based on the Modified Couple Stress Theory

被引：5
|
作者：
Zhao, Junfeng [1 ,2 ]
Zhou, Shenjie [2 ]
Wang, Binglei [1 ]
机构：
[1] Shandong Univ, Sch Civil Engn, Jinan 250061, Peoples R China
[2] Shandong Univ, Sch Mech Engn, Jinan 250061, Peoples R China
来源：
ADVANCED MATERIALS AND STRUCTURES, PTS 1 AND 2 | 2011年 / 335-336卷
基金：
中国国家自然科学基金; 高等学校博士学科点专项科研基金;
关键词：
size dependent; pull-in; micro-beam; modified couple stress theory; MEMS; analog equation method; ELECTROMECHANICAL MODEL; ELASTICITY; MEMS; MICROSTRUCTURE; PLASTICITY;
D O I：
10.4028/www.scientific.net/AMR.335-336.633
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A modified continuum model of electro-statically actuated micro-beam is presented based on the modified couple stress theory. The new model contains a material length scale parameter and can capture the size effect, unlike the classical Bernoulli-Euler beam theory. The governing equation of the micro-beam is derived based on the Hamilton's principle, which accounts for the effects of the moderately large deflection, the residual stress and the fringing electrostatic field. The numerical analysis of mechanical characterization is performed by the Analog Equation Method (AEM). The effects of the couple stress on the static and dynamic responses, pull-in voltage and pull-in time are discussed.
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页码：633 / +
页数：2
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