Metallic nanocrystals formation from metal-oxide nanocrystals via evaporation process

被引：0
|
作者：
Ota, K [1 ]
Murakami, H [1 ]
Kita, E [1 ]
机构：
[1] Univ Tsukuba, Tsukuba Adv Res Alliance Ctr, Tsukuba, Ibaraki 3058577, Japan
来源：
MATERIALS TRANSACTIONS | 2001年 / 42卷 / 08期
关键词：
gas deposition; metallic nanocrystal; metal oxides; alumina decomposition; thin film;
D O I：
10.2320/matertrans.42.1638
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Metal or metal-oxide nanocrystals can be formed by the gas deposition method. Here we report a modified.-as deposition method, by which nanocrystals of metal oxides are synthesized at first, and transformed into metal nanocrystals by heating the carrying gas. By controlling the heating temperature we can selectively deposit either dielectric films or conductive films in the same deposition process. Demonstrative experiments for transforming Al2O3 nanocrystals into At nanocrystals are shown.
引用
收藏
页码：1638 / 1640
页数：3
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