Silicon self-diffusivity measurement in thermal SiO2 by 30Si/28Si isotopic exchange

被引：41

作者：

Mathiot, D

Schunck, JP

Perego, M

Fanciulli, M

Normand, P

Tsamis, C

Tsoukalas, D

机构：

[1] CNRS, PHASE, F-67037 Strasbourg, France

[2] INFM, Lab MDM, I-20041 Agrate Brianza, Milan, Italy

[3] IMEL Demokritos, GR-15310 Athens, Greece

来源：

JOURNAL OF APPLIED PHYSICS | 2003年 / 94卷 / 03期

关键词：

D O I：

10.1063/1.1589168

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Isotopic exchange is used to measure the silicon self-diffusivity in thermal silicon dioxide. The experiments, using an isotopically enriched Si-28 oxide layer, are specially designed to obtain the actual equilibrium diffusivity in the oxide. A simple Arrhenius law, with an activation energy of 5.34 eV, very nicely describes the measured diffusivities as a function of the temperature. Our values are compared with literature data, and we discuss the possible origin of the observed differences. (C) 2003 American Institute of Physics.

引用

页码：2136 / 2138

页数：3

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