Silicon self-diffusivity measurement in thermal SiO2 by 30Si/28Si isotopic exchange

被引：41
|
作者：
Mathiot, D
Schunck, JP
Perego, M
Fanciulli, M
Normand, P
Tsamis, C
Tsoukalas, D
机构：
[1] CNRS, PHASE, F-67037 Strasbourg, France
[2] INFM, Lab MDM, I-20041 Agrate Brianza, Milan, Italy
[3] IMEL Demokritos, GR-15310 Athens, Greece
来源：
JOURNAL OF APPLIED PHYSICS | 2003年 / 94卷 / 03期
关键词：
D O I：
10.1063/1.1589168
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Isotopic exchange is used to measure the silicon self-diffusivity in thermal silicon dioxide. The experiments, using an isotopically enriched Si-28 oxide layer, are specially designed to obtain the actual equilibrium diffusivity in the oxide. A simple Arrhenius law, with an activation energy of 5.34 eV, very nicely describes the measured diffusivities as a function of the temperature. Our values are compared with literature data, and we discuss the possible origin of the observed differences. (C) 2003 American Institute of Physics.
引用
收藏
页码：2136 / 2138
页数：3
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