Detector and data acquisition system for an imaging ellipsometer

被引：0
|
作者：
Karlsson, B [1 ]
机构：
[1] Linkoping Univ, Dept Phys & Measurement Technol, S-58183 Linkoping, Sweden
来源：
WHERE INSTRUMENTATION IS GOING - CONFERENCE PROCEEDINGS, VOLS 1 AND 2 | 1998年
关键词：
D O I：
暂无
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
This paper describes a CCD detector to be used for imaging ellipsometry. For imaging ellipsometry a fast detector with a high resolution is wanted. It is also important to have control over the gain. The systems on the market today fulfill the speed and resolution criteria, but they lack the possibility to control the gain. The detector and data acquisition system described in this paper has a maximum sampling speed of approximately 20 pictures/second, a resolution of 11-12 bits and a manually adjustable gain.
引用
收藏
页码：679 / 682
页数：4
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