Investigation of structured head diffraction gratings for linear optical encoder

被引:0
|
作者
Zherdev, A. Y. [1 ]
Odinokov, S. B. [1 ]
Kovalev, M. S. [1 ]
Lushnikov, D. S. [1 ]
Markin, V. V. [1 ]
Shishova, M. V. [1 ]
Stsepuro, N. G. [1 ]
机构
[1] Bauman Moscow State Tech Univ, 2-ya Baumanskaya Ul 5-1, Moscow 105005, Russia
基金
俄罗斯科学基金会;
关键词
optical position encoder; optical displacement sensor; precision position sensor; linear encoder; diffraction grating;
D O I
10.1117/12.2326998
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Optical position encoders working according to the interference method consists of a measurement scale and a measuring head moving along each other. The scale has a reflection diffraction grating on its surface and the measuring head has a transmission diffraction grating with same period inside. Laser light passing and diffracting through these two gratings creates an interference signal on an optical detector. Decoding of the interference signal phase allows to determinate current position. Known optical position encoders use complex optical schemes and some phase optical elements to form several quadrature signals with different phase for higher encoder accuracy. Previously we researched such kind of schemes [1, 2]. In this paper we propose to use a common optical scheme without phase elements but with a complex structured measuring head grating for this purpose to simplify an optical scheme and alignment requirements. The optical scheme of position encoder based on measuring head grating with specific structure is research and described in this paper.
引用
收藏
页数:7
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